1. Robot_Lv1_Sequence
   1. Track_Move
   2. Track_Stop
   3. Track_Init
   4. Track_Home
   5. Arm_Pick
   6. Arm_Place
   7. Arm_Stop
   8. Arm_Init
   9. Arm_Home
2. LoadPort_Lv1_Sequence
   1. Foup_Clamp
   2. Foup_Unclamp
   3. CarrierID_Read
   4. Slot_Mapping
   5. POD_Close
   6. POD_Open
   7. LoadPort_Init
3. Robot_Lv2_Sequence
   1. Wafer_Load_Port1~4
   2. Wafer_Unload_Port1~4
   3. Wafer_Load_Buf1~2
   4. Wafer_Unload_Buf1~2
4. LoadPort_Lv2_Sequence
   1. Foup_Load1~4
   2. Foup_Unload1~4
5. Buffer_Sequence
   1. Up
   2. Down
   3. Init
   4. Stop